Open Access

ARTICLE

Optimization of MEMS Piezo-Resonators

A. Frangi¹, M. Cremonesi¹, A. Jaakkola², K. Bathe²

1 Politecnico di Milano, Italy.
2 VTT, Technical Research Centre of Finland,Espoo, Finland.

Structural Longevity 2012, 7(2), 129-134. https://doi.org/10.3970/sl.2012.007.129

Abstract

Single crystal silicon MEMS resonators are a potential alternative to quartz for timing and frequency control applications. Even if capacitive resonators with very high quality factors have been demonstrated and produced commercially, in order to achieve a good electromechanical coupling and admissible impedance levels, large bias voltages and submicron gaps are required. To overcome these challenges, piezotransduced bulk MEMS resonators have rapidly emerged as a valid alternative. We propose a numerical strategy to simulate dissipation mechanisms that correctly reproduce available experimental data.

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Keywords

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