Optimization of MEMS Piezo-Resonators
A. Frangi1, M. Cremonesi1, A. Jaakkola2, K. Bathe2
Structural Longevity, Vol.7, No.2, pp. 129-134, 2012, DOI:10.3970/sl.2012.007.129
Abstract Single crystal silicon MEMS resonators are a potential alternative to
quartz for timing and frequency control applications. Even if capacitive resonators
with very high quality factors have been demonstrated and produced commercially,
in order to achieve a good electromechanical coupling and admissible impedance
levels, large bias voltages and submicron gaps are required. To overcome these
challenges, piezotransduced bulk MEMS resonators have rapidly emerged as a
valid alternative. We propose a numerical strategy to simulate dissipation mechanisms that correctly reproduce available experimental data. More >