Daisuke Ishihara1,2, Tomoyoshi Horie1, Tomoya Niho1, Akiyoshi Baba3
CMES-Computer Modeling in Engineering & Sciences, Vol.108, No.6, pp. 429-452, 2015, DOI:10.3970/cmes.2015.108.429
Abstract In this study, a hierarchal decomposition is proposed to solve the structure- fluid-electrostatic interaction in a microelectromechanical system (MEMS). In the proposed decomposition, the structure-fluid-electrostatic interaction is partitioned into the structure-fluid interaction and the electrostatic field using the iteratively staggered method, and the structure-fluid interaction is split into the structurefluid velocity field and the fluid pressure field using the projection method. The proposed decomposition is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparisons among the numerical and experimental results that the proposed method can predict More >
Login
Register
