Kunrong Shen*, Wanchun Jin, Jin Wang
Frontiers in Heat and Mass Transfer, Vol.22, No.5, pp. 1361-1379, 2024, DOI:10.32604/fhmt.2024.057372
- 30 October 2024
Abstract The modified Siemens method is the dominant process for the production of polysilicon, yet it is characterised by high energy consumption. Two models of laboratory-grade Siemens reduction furnace and 12 pairs of rods industrial-grade Siemens chemical vapor deposition (CVD) reduction furnace were established, and the effects of factors such as the diameter of silicon rods, the surface temperature of silicon rods, the air inlet velocity and temperature on the heat transfer process inside the reduction furnace were investigated by numerical simulation. The results show that the convective and radiant heat losses in the furnace increased… More >
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