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    ARTICLE

    Design and Fabrication of an Electrostatic Variable Gap Comb Drive in Micro-Electro-Mechanical Systems

    Wenjing Ye1, Subrata Mukherjee2

    CMES-Computer Modeling in Engineering & Sciences, Vol.1, No.1, pp. 111-120, 2000, DOI:10.3970/cmes.2000.001.111

    Abstract Polynomial driving-force comb drives are designed using numerical simulation. The electrode shapes are obtained using the indirect boundary element method. Variable gap comb drives that produce combinations of linear, quadratic, and cubic driving-force profiles are synthesized. This inverse problem is solved by an optimization procedure. Sensitivity analysis is carried out by the direct differentiation approach (DDA) in order to compute design sensitivity coefficients (DSCs) of force profiles with respect to parameters that define the shapes of the fingers of a comb drive. The DSCs are then used to drive iterative optimization procedures. Designs of variable More >

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