C.P. Providakis1
Structural Durability & Health Monitoring, Vol.3, No.1, pp. 29-34, 2007, DOI:10.3970/sdhm.2007.003.029
Abstract Actuators are structures that give micro-electro-mechanical systems (MEMS) the ability to interact with their environment rather than just passively sensing it. Recent studies of MEMS thermal micro-actuators have shown that simple in design and production devices can provide deflection of the order of 10 μm at low voltages. Recently, metals and single-crystal silicon materials were included in the range of materials used for thermal actuators since they operate at lower temperatures than the commonly used (poly)silicon devices. These actuators are liable to meet the loads in service, so the corresponding integrity and stability analysis constitutes a… More >
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