Hao-Miao Zhou1, Fang Li1, Qiang Ye1, Ji-Xiang Zhao1, Zhe-Lei Xia1, YingTang2, Jing Wei3
CMC-Computers, Materials & Continua, Vol.13, No.3, pp. 235-248, 2009, DOI:10.3970/cmc.2009.013.235
Abstract At present, there are many methods about Young's modulus measurement of thin films, but so far there is no recognized simple, non-destructive and cheaper standard measurement method. Considering thin films with various thicknesses were sputter deposited on the magnetostrictive resonator and monitoring the resonator's first-order longitudinal resonant frequency shift both before and after deposition induced by external magnetic field, an Young's modulus assessing method based on classical laminated plate theory is presented in this paper. Using the measured natural frequencies of Au, Cu, Cr, Al and SiC materials with various thicknesses in the literature, the More >
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