Kuntao Ye1,*, Yan Luo1, Yingtao Jiang2,*
CMES-Computer Modeling in Engineering & Sciences, Vol.114, No.3, pp. 261-276, 2018, DOI:10.3970/cmes.2018.114.261
Abstract Torsional micromirror devices have been widely used in micro displays, RF switches, optical communications, and optical coherence tomography systems. In order to study the stability of electrostatically driven torsional micromirror system with double bottom plates and two voltage sources, a dimensionless, two degrees of freedom (2-DoF) dynamic model was constructed. Governed by the dimensionless phase space model equation, the pull-in and bifurcation phenomena were analyzed using the Hamiltonian method and numerical simulation. In particular, the influence of the damping coefficient and the torsion-bending coupling effect on the phase trajectory was investigated. Furthermore, the conditions that… More >
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