P. Bettini, E. Brusa, M. Munteanu, R. Specogna, F. Trevisan1
CMES-Computer Modeling in Engineering & Sciences, Vol.33, No.3, pp. 215-242, 2008, DOI:10.3970/cmes.2008.033.215
Abstract Electrostatic microactuator is a paradigm of MEMS. Cantilever and double clamped microbeams are often used in microswitches, microresonators and varactors. An efficient numerical prediction of their mechanical behaviour is affected by the nonlinearity of the electromechanical coupling. Sometimes an additional nonlinearity is due to the large displacement or to the axial-flexural coupling exhibited in bending. To overcome the computational limits of the available numerical methods two new formulations are here proposed and compared. Modifying the classical beam element in the Finite Element Method to allow the implementation of a \emph {Non incremental sequential approach} is… More >
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