T. Starling1, M. F. Daqaq1, G. Li1,2
CMES-Computer Modeling in Engineering & Sciences, Vol.45, No.3, pp. 207-226, 2009, DOI:10.3970/cmes.2009.045.207
Abstract Input-shaping is an open-loop control technique for dynamic control of electrostatic MEMS. In MEMS applications, open-loop control is attractive as it computes a priori the required system input to achieve desired dynamic behavior without using feedback. In this work, a 3-D computational electromechanical analysis is performed to preshape the voltage commands applied to electrostatically actuate a torsional micromirror to a desired tilt angle with minimal residual oscillations. The effect of higher vibration modes on the controlled response is also investigated. It is shown that, for some structural design parameters, the first bending mode of the More >
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