Lionel Fabian Fourie1, Lynndle Square2,*
FDMP-Fluid Dynamics & Materials Processing, Vol.16, No.2, pp. 225-235, 2020, DOI:10.32604/fdmp.2020.08771
- 21 April 2020
Abstract A heat transfer study was conducted, in the framework of Computational Fluid Dynamics (CFD), on a Hot-Wire Chemical Vapour Deposition
(HWCVD) reactor chamber to determine a safe deposition distance for atomic
hydrogen produced by HWCVD. The objective of this study was to show the feasibility of using heat transfer simulations in determining a safe deposition distance
for deposition of this kind. All CFD simulations were set-up and solved within the
framework of the CFD packages of OpenFOAM namely; snappyHexMesh for
mesh generation, buoyantSimpleFoam and rhoSimpleFoam as the solvers and
paraView as the post-processing tool. Using More >