Shailendra K. Tiwaria,*
, Somashekara Bhata
, Krishna K. Mahatob
, Bharath B. Manjunathc
Frontiers in Heat and Mass Transfer, Vol.10, pp. 1-8, 2018, DOI:10.5098/hmt.10.9
Abstract This paper presents the design and simulation of a thin film microheater. This can have promising applications in bio-medical analysis, explosive
detection, gas sensing, and micro-thrusters. An approach is presented to enhance the thermal uniformity of parallel microheater. The modeling of
microheater is done using glass as a substrate material. The analysis is carried out with different resistive material for the heater. To study the
response of the microheater to the different supply voltage, substrate thickness, and time interval, finite element simulation is carried out with
commercial FEM analysis tool- COMSOL Multiphysics 5.2a. The proposed More >
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