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Home/ Journals/ ICCES/ Vol.18, No.1, 2011/ 10.3970/icces.2011.018.011

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ABSTRACT

An investigation on the bilayer buckling technique for thin film metrology

Jia Fei, Xiu-Peng Zheng, Yan-Ping Cao*, Xi-Qiao Feng

TSP_ICCES_11.pdf

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