Open Access

ABSTRACT

An Investigation into Atomic Scale Forming Mechanism and Friction Characteristics in Direct Nanoimprint by Molecular Dynamics Simulation

Chih-Wei Hsieh¹, Chien-Li Wu¹, Cheng-Kuo Sung^1,2

1 Dept. of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan,R.O.C.
2 E-mail: cksung@pme.nthu.edu.tw