An Investigation into Atomic Scale Forming Mechanism and Friction Characteristics in Direct Nanoimprint by Molecular Dynamics Simulation
Chih-Wei Hsieh1, Chien-Li Wu1, Cheng-Kuo Sung1,2
The International Conference on Computational & Experimental Engineering and Sciences, Vol.13, No.2, pp. 33-34, 2009, DOI:10.3970/icces.2009.013.033
Abstract Molecular dynamics (MD) simulation has been demonstrated as a promising method to analyze formation and friction mechanisms of the nanoimprint process. Especially, it provides a useful tool for investigating critical issues that are generally difficult to be examined by the experiment because of cross talks among influential factors or attainability of direct measurement. This study utilized the friction mechanism to explore the factors that would affect the quality of mold replication in the direct nanoimprint. Those factors included mechanical properties of thin films, interaction force between mold and thin-film materials, and surface roughness of the… More >
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