Open Access

ARTICLE

DESIGN AND SIMULATION OF PARALLEL MICROHEATER

by

a Department of E. C. E, Manipal Institute of Technology, Manipal Academy of Higher Education, Manipal, Karnataka, 576104, India
b School of Life Sciences, Manipal Academy of Higher Education, Manipal, Karnataka, 576104, India
c Manipal Technologies Ltd, Manipal, Karnataka, 576104, India

* Corresponding Author: Email:

Frontiers in Heat and Mass Transfer 2018, 10, 1-8. https://doi.org/10.5098/hmt.10.9

Abstract

This paper presents the design and simulation of a thin film microheater. This can have promising applications in bio-medical analysis, explosive detection, gas sensing, and micro-thrusters. An approach is presented to enhance the thermal uniformity of parallel microheater. The modeling of microheater is done using glass as a substrate material. The analysis is carried out with different resistive material for the heater. To study the response of the microheater to the different supply voltage, substrate thickness, and time interval, finite element simulation is carried out with commercial FEM analysis tool- COMSOL Multiphysics 5.2a. The proposed design in Model 1 have high contact resistance and it suffers from the contact-heating problem; however, Model 2 offers an excellent thermal uniformity with a tolerance of 1°C. There is a good agreement between the simulated and the theoretical results.

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Keywords

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