Open Access

ARTICLE

Modeling a Discontinuous CVD Coating Process: I. Model Development and Validation

Joseph G. Lawrence, Arunan Nadarajah¹

1 Department of Chemical and Environmental Engineering, University of Toledo, Toledo, Ohio 43606, USA. Corresponding author: nadarajah@utoledo.edu

Fluid Dynamics & Materials Processing 2007, 3(3), 247-254. https://doi.org/10.3970/fdmp.2007.003.247

Abstract

A simplified 2D pseudo steady state model was developed for an atmospheric chemical vapor deposition (CVD) process on glass. This is used to study the feasibility of converting a continuous coating process to one with discrete glass plates with a gap between them. A preliminary estimate employing mass transfer correlations suggested that there would be significant concentration variations due to the gap between the plates. More detailed studies were done by solving the model numerically employing a finite difference scheme with a vorticity-stream function formulation, and employing the commercial computational fluid dynamics program FIDAP which employs a finite element scheme. The equations for the velocity profile in the model were solved with both methods and node by node comparisons were carried out. The results showed close agreement between both approaches which indicated the applicability of the FIDAP program to this problem. The results also indicated the validity of the pseudo steady state model developed here. In a subsequent study a more detailed model was employed with FIDAP to examine the effect of the gap between the plates on the CVD coating process [Lawrence, J.G.; Dismukes, J.P.; Nadarajah, A. (2006): FDMP: Fluid Dynamics {\&} Materials Processing, vol.1,pp.18-27.].

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