Open Access

ARTICLE

Effects of Rotation on Heat Flow, Segregation, and Zone Shape in a Small-scale Floating-zone Silicon Growth under Axial and Transversal Magnetic Fields

C. W. Lan¹, B. C. Yeh

1 Department of Chemical Engineering National Taiwan University, Taipei 10617, Taiwan, ROC Email: cwlan@ntu.edu.tw Fax: 8862-2363-3917.

Fluid Dynamics & Materials Processing 2005, 1(1), 33-44. https://doi.org/10.3970/fdmp.2005.001.033

Abstract

The suppression of unstable Marangoni convection in floating-zone crystal growth by magnetic fields has enjoyed over recent years a widespread use as a reliable and useful strategy. A transversal direction of the field is particularly efficient, but asymmetric zone shapes and thus segregation are induced. Counter-rotation of the feed and of the crystal rods is a common way to improve dopant homogeneity. However, its effects under magnetic fields are complex and have not yet been studied in detail. In the present analysis, three-dimensional (3D) simulations based on a finite-volume/multigrid method are used to illustrate the effects of rotation on the heat flow, dopant segregation, and the zone shape for a small-scale floating-zone silicon growth under both axial and transversal magnetic fields. The role of electrical conductivity of the crystal is also taken into account.

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Keywords

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