Open Access

ARTICLE

Local Stress Field in Wafer Thinning Simulations with Phase Space Averaging

Miaocao Wang¹, Yuhua Huang¹, Jinming Li¹, Ling Xu², Fulong Zhu^1,*

1 School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China
2 School of Microelectronics, Fudan University, Shanghai, 200433, China

* Corresponding Author: Fulong Zhu. Email: