Open Access

ARTICLE

Rupture and Instability of Soft Films due to Moisture Vaporization in Microelectronic Devices

Linsen Zhu¹, Jiang Zhou², Xuejun Fan²

1 Research Center of Mechanics and Mechatronic Equipment, Shandong University #180 W. Wenhua Road, Weihai, Shandong 264209, P.R. China. E-mail: zlinsen@sina.com
2 Department of Mechanical Engineering, Lamar University, Beaumont, Texas 77710, USA. E-mail: jenny.zhou@lamar.edt; xuejun.fan@lamar.edu