Open Access

ARTICLE

Eigenvalue Analysis of MEMS Components with Multi-defect using Infinite Element Method Algorithm

De-Shin Liu^1,2, Chin-Yi Tu¹, Cho-Liang Chung³

1 Advanced Institute of Manufacturing for High-tech Innovations and Department of Mechanical Engineering, National Chung Cheng University, 168, University Rd., Min-Hsiung, Chia-Yi, 621, Taiwan, R.O.C.
2 Corresponding author. Tel.: +886-5-2720411 (Ext: 33305); fax: +886-5-2720589. E-mail address: imedsl@ccu.edu.tw (D.S. Liu).
3 Department of Materials Science and Engineering, I-Shou University, No. 1, section 1, Shiuecheng Road, Dashu Shiang, Kaohsiung Country, Taiwan, 840, R.O.C.