%0 Journal Article %A Liu, De-Shin %A Tu, Chin-Yi %A Chung, Cho-Liang %D 2012 %J Computers, Materials \& Continua %@ 1546-2226 %V 28 %N 2 %P 97--120 %T Eigenvalue Analysis of MEMS Components with Multi-defect using Infinite Element Method Algorithm %M doi:10.3970/cmc.2012.028.097 %U http://www.techscience.com/cmc/v28n2/27861