Open Access

ARTICLE

The Simulation of Diaphragm Deflection Actuated by Shear Mode Piezoelectric Actuator in Microdroplet Ejector

C. H. Cheng¹, S. C. Chen²

1 DA-YEH University, ChangHua, Taiwan
2 National Changhua University of Education, ChangHua, Taiwan

Computers, Materials & Continua 2004, 1(3), 205-212. https://doi.org/10.3970/cmc.2004.001.205

Abstract

A shear mode piezoelectric actuator is applied to deflect the diaphragm of pressure chamber in the droplet ejector or inkjet printhead. The deflection of the bulge-diaphragm and resulting swept volume is analyzed by analytical and numerical method. With free-body treatment of the model, the analytical exact solutions for the two free bodies of bulge-diaphragm and piezoelectric beam were obtained. Also, the numerical solution by ANSYS is obtained to verify the analytical result. Besides, the whole-model solution coupling the bulge-diaphragm and piezoelectric beam together was obtained by ANSYS to compare with the result of free-body analysis. In order to estimate the maximum actuating force and deflection of the shear mode piezoelectric actuator, the diaphragm characteristic curve is obtained in the free-body analysis, which presents the decreasing tendency of the central deflection with the increase of anti-deflection (or reaction) force under certain actuating voltage. Also, the diaphragm characteristic curve is obtained showing the central deflection in proportion to the action force. By combining both kinds of curves, the actuated central deflection of the bulge-diaphragm can be obtained under certain actuating voltage. Finally, both linear relations including diaphragm central deflection in proportion to actuating voltage and volume displacement in proportion to diaphragm central deflection are obtained.

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Keywords

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