Open Access

ARTICLE

Theoretical Study on the Bilayer Buckling Technique for Thin Film Metrology

Fei Jia¹, Xiu-Peng Zheng^1,2, Yan-Ping Cao^1,3, Xi-Qiao Feng¹

1 AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
2 CNNC China Nuclear Power Engineering Co., Ltd. Beijing 100840, China
3 Corresponding author: Tel.: +86 10 62772520; e-mail: caoyanping@mail.tsinghua.edu.cn