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Home/ Journals/ CMES/ Vol.5, No.3, 2004/ 10.3970/cmes.2004.005.279

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Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator

Wan-Sul Lee, Kie-Chan Kwon, Bong-Kyu Kim, Ji-Hyon Cho, Sung-Kie Youn1

Department of Mechanical Engineering, KAIST, 373-1, Guseongdong, Yuseong-gu, Daejon, 305-701, KOREA

Computer Modeling in Engineering & Sciences 2004, 5(3), 279-286. https://doi.org/10.3970/cmes.2004.005.279

Abstract

A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micro-mechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data.

Keywords

micro-mechanical actuator, electrostatic field, natural frequency shifting, coupled field analysis.

Cite This Article

APA Style
Lee, W., Kwon, K., Kim, B., Cho, J., Youn, S. (2004). Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator. Computer Modeling in Engineering & Sciences, 5(3), 279–286. https://doi.org/10.3970/cmes.2004.005.279
Vancouver Style
Lee W, Kwon K, Kim B, Cho J, Youn S. Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator. Comput Model Eng Sci. 2004;5(3):279–286. https://doi.org/10.3970/cmes.2004.005.279
IEEE Style
W. Lee, K. Kwon, B. Kim, J. Cho, and S. Youn, “Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator,” Comput. Model. Eng. Sci., vol. 5, no. 3, pp. 279–286, 2004. https://doi.org/10.3970/cmes.2004.005.279
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cc Copyright © 2004 The Author(s). Published by Tech Science Press.
This work is licensed under a Creative Commons Attribution 4.0 International License , which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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