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ARTICLE
Frequency-Shifting Analysis of Electrostatically Tunable Micro-Mechanical Actuator
Department of Mechanical Engineering, KAIST, 373-1, Guseongdong, Yuseong-gu, Daejon, 305-701, KOREA
Computer Modeling in Engineering & Sciences 2004, 5(3), 279-286. https://doi.org/10.3970/cmes.2004.005.279
Abstract
A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micro-mechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data.Keywords
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