Open Access

ARTICLE

The Temperature-Quantum-Correction Effect on the MD-Calculated Thermal Conductivity of Silicon Thin Films

Tai-Ming Chang¹, Chien-Chou Weng¹, Mei-Jiau Huang^1,2, Chun-KaiLiu², Chih-Kuang Yu²

1 Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
2 Electronics & Optoelectronics Research Laboratories, Industrial Technology Research Institute,Taiwan