Open Access

ARTICLE

Estimation of thermo-elasto-plastic properties of thin-film mechanical properties using MD nanoindentation simulations and an inverse FEM/ANN computational scheme

D. S. Liu¹, C.Y. Tsai¹

1 Department of Mechanical Engineering, National Chung Cheng University, 168, University Rd., Ming-Hsiung, Chia-Yi, 621, Taiwan, R.O.C.