Open Access

ARTICLE

Design and Fabrication of an Electrostatic Variable Gap Comb Drive in Micro-Electro-Mechanical Systems

Wenjing Ye¹, Subrata Mukherjee²

1 Georgia Institute of Technology, School of Mechanical Engineering, 281 Ferst Drive, SSTC #1, Room 209, Atlanta, GA 30332-0405
2 Department of Theoretical and Applied Mechanics, Kimball Hall, Cornell University, Ithaca, NY 14853