Vol.1, No.1, 2000, pp.111-120, doi:10.3970/cmes.2000.001.111
Design and Fabrication of an Electrostatic Variable Gap Comb Drive in Micro-Electro-Mechanical Systems
  • Wenjing Ye1, Subrata Mukherjee2
Georgia Institute of Technology, School of Mechanical Engineering, 281 Ferst Drive, SSTC #1, Room 209, Atlanta, GA 30332-0405
Department of Theoretical and Applied Mechanics, Kimball Hall, Cornell University, Ithaca, NY 14853
Polynomial driving-force comb drives are designed using numerical simulation. The electrode shapes are obtained using the indirect boundary element method. Variable gap comb drives that produce combinations of linear, quadratic, and cubic driving-force profiles are synthesized. This inverse problem is solved by an optimization procedure. Sensitivity analysis is carried out by the direct differentiation approach (DDA) in order to compute design sensitivity coefficients (DSCs) of force profiles with respect to parameters that define the shapes of the fingers of a comb drive. The DSCs are then used to drive iterative optimization procedures. Designs of variable gap comb drives with linear, quadratic and cubic driving force profiles are presented in this paper. Based on these designs, a comb drive which produces cubic polynomial driving force has been fabricated using the SCREAM I process. Test results show reasonable agreement between numerical simulations and experiments.
optimal design, boundary element method, micro-electro-mechanical systems, comb drive
Cite This Article
Ye, W., Mukherjee, S. (2000). Design and Fabrication of an Electrostatic Variable Gap Comb Drive in Micro-Electro-Mechanical Systems. CMES-Computer Modeling in Engineering & Sciences, 1(1), 111–120.
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