%0 Journal Article %A Garikipati, K. %A Rao, V.S. %A Hao, M.Y. %A Ibok, E. %A Wolf, I.-de %A Dutton, R.-W. %D 2000 %J Computer Modeling in Engineering \& Sciences %@ 1526-1506 %V 1 %N 1 %P 65--84 %T Modelling and Validation of Contribions to Stress in the Shallow Trench Isolation Process Sequence %M doi:10.3970/cmes.2000.001.065 %U http://www.techscience.com/CMES/v1n1/24666