@Article{cmes.2000.001.045, AUTHOR = {B. F. Romanowicz, M. H. Zaman, S. F. Bart, V. L. Rabinovich, I. Tchertkov, S. Zhang, M. G. da Silva, M. Deshpande, K. Greiner, J. R. Gilbert, Shawn Cunningham}, TITLE = {A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS}, JOURNAL = {Computer Modeling in Engineering \& Sciences}, VOLUME = {1}, YEAR = {2000}, NUMBER = {1}, PAGES = {45--64}, URL = {http://www.techscience.com/CMES/v1n1/24665}, ISSN = {1526-1506}, ABSTRACT = {Development of micro-electro-mechanical systems (MEMS) products is currently hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of microsystems requires a top-down approach to system design which, in turn, requires designers from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a methodology and tool-set which directly support such an integrated design process.}, DOI = {10.3970/cmes.2000.001.045} }