Open Access

ARTICLE

A Methodology and Associated CAD Tools for Support of Concurrent Design of MEMS

B. F. Romanowicz¹, M. H. Zaman¹, S. F. Bart¹, V. L. Rabinovich¹, I. Tchertkov¹, S. Zhang¹, M. G. da Silva¹, M. Deshpande¹, K. Greiner¹, J. R. Gilbert¹, Shawn Cunningham²

1 Microcosm Technologies, Inc., 215 First St., Ste. 219, Cambridge, MA02142 U.S.A, Email: bfr@memcad.com.
2 Ford Microelectronics, Inc., Colorado Springs, CO, U.S.A.

Computer Modeling in Engineering & Sciences 2000, 1(1), 45-64. https://doi.org/10.3970/cmes.2000.001.045

Abstract

Development of micro-electro-mechanical systems (MEMS) products is currently hampered by the need for design aids, which can assist in integration of all domains of the design. The cross-disciplinary character of microsystems requires a top-down approach to system design which, in turn, requires designers from many areas to work together in order to understand the effects of one sub-system on another. This paper describes current research on a methodology and tool-set which directly support such an integrated design process.

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Keywords

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