Open Access

ARTICLE

Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics

S. Taschini¹, J. Müller², A. Greiner², M. Emmenegger¹, H. Baltes¹, J.G. Korvink²

1 Physical Electronics Laboratory, ETH Zürich, Switzerland
2 IMTEK, University of Freiburg, Germany

Computer Modeling in Engineering & Sciences 2000, 1(1), 31-44. https://doi.org/10.3970/cmes.2000.001.031

Abstract

We present three techniques to accurately model the thermomechanical response of microsystem components: a new, accurate and stable Kirchhoff-Love multi-layered plate model implemented as an Argyris finite element, a model for the amplitude fluctuations of vibrational modes in micro-mechanical structures within a gaseous environment, and the consistent refinement of a finite element mesh in order to maximize the computational accuracy for a given mesh size. We have implemented these techniques in our in-house MEMS finite element program and accompanying Monte Carlo simulator. We demonstrate our approach to dynamic modeling by computing the thermomechanical response of a CMOS AFM beam.

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Keywords

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