Open Access

ARTICLE

Enhancing the Effectiveness of Trimethylchlorosilane Purification Process Monitoring with Variational Autoencoder

Jinfu Wang¹, Shunyi Zhao^1,*, Fei Liu¹, Zhenyi Ma²

1 Key Laboratory of Advanced Process Control for Light Industry (Ministry of Education), Jiangnan University, Wuxi, 214122, China
2 Hangzhou JASU Environmental Monitoring Co., Ltd., Hangzhou, 311999, China

* Corresponding Author: Shunyi Zhao. Email: