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Hierarchal Decomposition for the Structure-Fluid-Electrostatic Interaction in a Microelectromechanical System

Daisuke Ishihara1,2, Tomoyoshi Horie1, Tomoya Niho1, Akiyoshi Baba3

Department of Mechanical Systems Engineering, Kyushu Institute of Technology, 680-4 Kawazu,Iizuka, Fukuoka 820-8502, Japan
Correspondence author. E-mail: ishihara@mse.kyutech.ac.jp
Center for Microelectronic System (CMS), Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan

TSP_CMES_429.pdf

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