Open Access

ARTICLE

Hierarchal Decomposition for the Structure-Fluid-Electrostatic Interaction in a Microelectromechanical System

Daisuke Ishihara^1,2, Tomoyoshi Horie¹, Tomoya Niho¹, Akiyoshi Baba³

1 Department of Mechanical Systems Engineering, Kyushu Institute of Technology, 680-4 Kawazu,Iizuka, Fukuoka 820-8502, Japan
2 Correspondence author. E-mail: ishihara@mse.kyutech.ac.jp
3 Center for Microelectronic System (CMS), Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan