Open Access

ARTICLE

Hierarchal Decomposition for the Structure-Fluid-Electrostatic Interaction in a Microelectromechanical System

by Daisuke Ishihara¹, Tomoyoshi Horie¹, Tomoya Niho¹, Akiyoshi Baba³

1 Department of Mechanical Systems Engineering, Kyushu Institute of Technology, 680-4 Kawazu,Iizuka, Fukuoka 820-8502, Japan
2 Correspondence author. E-mail: ishihara@mse.kyutech.ac.jp
3 Center for Microelectronic System (CMS), Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan

Computer Modeling in Engineering & Sciences 2015, 108(6), 429-452. https://doi.org/10.3970/cmes.2015.108.429

Abstract

In this study, a hierarchal decomposition is proposed to solve the structure- fluid-electrostatic interaction in a microelectromechanical system (MEMS). In the proposed decomposition, the structure-fluid-electrostatic interaction is partitioned into the structure-fluid interaction and the electrostatic field using the iteratively staggered method, and the structure-fluid interaction is split into the structurefluid velocity field and the fluid pressure field using the projection method. The proposed decomposition is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparisons among the numerical and experimental results that the proposed method can predict the MEMS vibration characteristics accurately.

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Keywords

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