Open Access

ARTICLE

Dynamic Response Analysis of the Fractional-Order System of MEMS Viscometer

X.S. He¹, Q.X. Liu¹, X.C. Huang², Y.M. Chen^1,3

1 Department of Mechanics, Sun Yat-sen University, No. 135 Xingang Road 510275 Guangzhou, China
2 Department of Mechanical Engineering, Ganzhou Institute of Technology, No. 88 Loutiling Road341000, Ganzhou, Jiangxi Province, China
3 Corresponding author: Dr. Y.M. Chen, Email: chenymao@mail.sysu.edu.cn