Open Access

ARTICLE

Hybrid Elements for Modelling Squeeze Film Effects Coupled with Structural Interactions in Vibratory MEMS Devices

A. Roychowdhury^1,2, A. Nandy¹, C.S. Jog¹, R. Pratap^1,2

1 Department of Mechanical Engineering, Indian Institute of Science, Bangalore, India.
2 Center for Nano Science and Engineering, Indian Institute of Science, Bangalore, India.