Hybrid Elements for Modelling Squeeze Film Effects Coupled with Structural Interactions in Vibratory MEMS Devices
A. Roychowdhury1,2, A. Nandy1, C.S. Jog1, R. Pratap1,2
CMES-Computer Modeling in Engineering & Sciences, Vol.103, No.2, pp. 91-110, 2014, DOI:10.3970/cmes.2014.103.091
Abstract We present a hybrid finite element based methodology to solve the coupled fluid structure problem of squeeze film effects in vibratory MEMS devices, such as gyroscopes, RF switches, and 2D resonators. The aforementioned devices often have a thin plate like structure vibrating normally to a fixed substrate, and are generally not perfectly vacuum packed. This results in a thin air film being trapped between the vibrating plate and the fixed substrate which behaves like a squeeze film offering both stiffness and damping. For accurate modelling of such devices the squeeze film effects must be incorporated.… More >
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