Multidimensional Semiconductor Device and Micro-Scale Thermal Modeling Using the PROPHET Simulator with Dial-an-Operator Framework
Anand L. Pardhanani, Graham F. Carey

doi:10.3970/cmes.2000.001.141
Source CMES: Computer Modeling in Engineering & Sciences, Vol. 1, No. 1, pp. 141-150, 2000
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Keywords device modeling, micro-scale, PROPHET, dial-an-operator
Abstract Rapid prototyping tools that combine powerful numerics with a flexible applications interface can play a significant role in micro-scale modeling and simulation. We demonstrate this idea using the PROPHET simulator. In the first part of the investigations we extend the simulator's capability to allow analysis of carrier transport in deep submicron MOSFETs using a hydrodynamic model. The model is numerically implemented within PROPHET's dial-an-operator framework by adding certain ``flux'' routines. Once implemented, the model becomes available for use in any number of spatial dimensions. We present results for MOSFET type test problems in one and two dimensions. The second application area that we explore here using the same simulator is micro-thermal analysis. The implementation of the thermal equation in PROPHET is demonstrated and results are presented for a test problem in three dimensions.
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