||CMES: Computer Modeling in Engineering & Sciences, Vol. 1, No. 1, pp. 111-120, 2000
||Full length paper in PDF format. Size = 470,719 bytes
||optimal design, boundary element method, micro-electro-mechanical systems, comb drive
Polynomial driving-force comb drives are designed using numerical
simulation. The electrode shapes are obtained using the indirect boundary
element method. Variable gap comb drives that produce combinations of linear,
quadratic, and cubic driving-force profiles are synthesized. This inverse
problem is solved by an optimization procedure.
is carried out by the direct differentiation approach (DDA) in order to compute
design sensitivity coefficients (DSCs) of force profiles with respect to
parameters that define the shapes of the fingers of a comb drive. The DSCs are then used to drive iterative
optimization procedures. Designs of variable gap comb drives with linear,
quadratic and cubic driving force profiles are presented in this paper. Based
on these designs, a comb drive which produces cubic polynomial driving force
has been fabricated using the SCREAM I process. Test results show reasonable agreement between numerical simulations and experiments.