We present three techniques to accurately model the thermomechanical response of microsystem components: a new, accurate and stable Kirchhoff-Love multi-layered plate model implemented as an Argyris finite element, a model for the amplitude fluctuations of vibrational modes in micro-mechanical structures within a gaseous environment, and the consistent refinement of a finite element mesh in order to maximize the computational accuracy for a given mesh size. We have implemented these techniques in our in-house MEMS finite element program and accompanying Monte Carlo simulator. We demonstrate our approach to dynamic modeling by computing the thermomechanical response of a CMOS AFM beam.
Cite This Article
Taschini, S., Müller, J., Greiner, A., Emmenegger, M., Baltes, H. et al. (2000). Accurate Modelling and Simulation of Thermomechanical Microsystem Dynamics.
CMES-Computer Modeling in Engineering & Sciences, 1(1), 31–44. https://doi.org/10.3970/cmes.2000.001.031