Analysis of Realistic Large MEMS Devices
Per Ljung, Martin Bachtold, Mirko Spasojevic

doi:10.3970/cmes.2000.001.021
Source CMES: Computer Modeling in Engineering & Sciences, Vol. 1, No. 1, pp. 21-30, 2000
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Keywords MEMS
Abstract This paper presents AutoMEMS, a numerical simulation environment to efficiently analyze the behavior of large real-world MEMS designs. By automating surface-based model generation, meshing and field solver tools, it is possible to rapidly model large complex MEMS devices.
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