This paper presents AutoMEMS®, a numerical simulation environment to efficiently analyze the behavior of large real-world MEMS designs. By automating surface-based model generation, meshing and field solver tools, it is possible to rapidly model large complex MEMS devices.
Cite This Article
Ljung, P., Bächtold, M., Spasojevic, M. (2000). Analysis of Realistic Large MEMS Devices. CMES-Computer Modeling in Engineering & Sciences, 1(1), 21–30.
This work is licensed under a Creative Commons Attribution 4.0 International License , which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.